JPH0626723Y2 - 電・空変換器 - Google Patents

電・空変換器

Info

Publication number
JPH0626723Y2
JPH0626723Y2 JP1987049235U JP4923587U JPH0626723Y2 JP H0626723 Y2 JPH0626723 Y2 JP H0626723Y2 JP 1987049235 U JP1987049235 U JP 1987049235U JP 4923587 U JP4923587 U JP 4923587U JP H0626723 Y2 JPH0626723 Y2 JP H0626723Y2
Authority
JP
Japan
Prior art keywords
voltage
nozzle
laminated piezoelectric
laminated
flapper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987049235U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63157501U (en]
Inventor
賢吉 ▲高▼寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1987049235U priority Critical patent/JPH0626723Y2/ja
Publication of JPS63157501U publication Critical patent/JPS63157501U/ja
Application granted granted Critical
Publication of JPH0626723Y2 publication Critical patent/JPH0626723Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP1987049235U 1987-03-31 1987-03-31 電・空変換器 Expired - Lifetime JPH0626723Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987049235U JPH0626723Y2 (ja) 1987-03-31 1987-03-31 電・空変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987049235U JPH0626723Y2 (ja) 1987-03-31 1987-03-31 電・空変換器

Publications (2)

Publication Number Publication Date
JPS63157501U JPS63157501U (en]) 1988-10-17
JPH0626723Y2 true JPH0626723Y2 (ja) 1994-07-20

Family

ID=30871499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987049235U Expired - Lifetime JPH0626723Y2 (ja) 1987-03-31 1987-03-31 電・空変換器

Country Status (1)

Country Link
JP (1) JPH0626723Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9333884B2 (en) 2011-03-31 2016-05-10 Ts Tech Co., Ltd. Conveyance seat

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6155501U (en]) * 1984-09-19 1986-04-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9333884B2 (en) 2011-03-31 2016-05-10 Ts Tech Co., Ltd. Conveyance seat

Also Published As

Publication number Publication date
JPS63157501U (en]) 1988-10-17

Similar Documents

Publication Publication Date Title
US5983721A (en) Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon
Juuti et al. Mechanically amplified large displacement piezoelectric actuators
US5646347A (en) Suspension for micromechanical structure and micromechanical acceleration sensor
EP0510698B1 (en) Displacement amplification mechanism using piezoelectric element
US5083056A (en) Displacement generating apparatus
JPH06188471A (ja) 電圧アクチュエータ
JPH0626723Y2 (ja) 電・空変換器
US20200200976A1 (en) Hinge for micro and nanoelectromechanical systems with out-of-plane displacement and reduced non-linearity
JPH0455355B2 (en])
EP0650642A1 (en) Ceramic deflection device
JPS62272575A (ja) 圧電アクチユエ−タ
US5361635A (en) Multiple servo loop accelerometer with tunnel current sensors
JP2606069B2 (ja) 圧電素子変位増幅機構およびその駆動方法
JPS6237835A (ja) 機械的増幅機構
JP6521442B2 (ja) 圧力センサ
JPH0438152B2 (en])
JPH01185175A (ja) 機械的増幅機構
JPS63216392A (ja) 積層アクチユエ−タのストロ−ク増幅器
JPS6230769Y2 (en])
JPH0469826B2 (en])
JPH0553996B2 (en])
JPH0453009Y2 (en])
JP3128785B2 (ja) ノズルフラッパ式流体圧調節器
JPH0245775Y2 (en])
JPH0453448Y2 (en])